Regress software pro#

The application offers also an interactive dispersion optimiser to create parametric models based on a reference dispersion table. In the same spirit the dispersion models can be easily created, inspected and modified.įit recipes and dispersion models can be saved and loaded in a simple, readable text format. The film stack an the fit recipe can be easily created and modified using the interface. Since version 2.0 all the operations can be performed from the user interface without the need of writing a script.

batch run on a set of spectra with a common fit recipe.

simultaneous fit of multiple spectra with common and individual parameters.different models for material dispersion curves: harmonic oscillators model, cauchy model, tauc-lorentz, forhoui-bloomer and lookup model.algorithms to perform grid search of best solutions.fit of ellipsometry or reflectivity spectra.The documentation for the application is available from the Regress Pro's main page. The software can also be adapted or improved to suit specific needs or to implement additional functions. This means that everyone can obtain, study or modify the source code and see exactly how each computation is done.

Regress software pro#

Regress Pro is unique among ellipsometry and reflectometry applications because it is free software. Different kind of dispersion models are available as well as a library of know materials. The application can be used to determine the thickness or the refractive index of thin films. It was developed for scientific and industrial applications and has been designed and tested mainly for thin film measurements in semiconductor industry. Regress Pro is a free software application that can be used to study experimental data coming from spectroscopic ellipsometers or reflectometers.